Composite metal polymer films
AssigneeNational Research Development Corporation
InventorsMartin White, Niyom Boonthanoom
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Abstract
A process is described for producing a composite metal film in which metalliferous particles and polymer particles are co-deposited on a substrate, the proportion of metalliferous particles being such that the metal film is discontinuous, the metal particles being present in the form of islands with intervening zones of polymeric material. The resulting composite films have negative temperature coefficient of resistance. The process may be applied to the production of semiconductor composite films, e.g., copper oxide films by means of an annealing oxidative treatment to convert metal to metal oxide before loss of polymeric matrix by oxidation or evaporation.
Claims17
A process for producing a composite metal polymer film having a negative temperature coefficient of resistance, comprising
- co-depositing, by evaporation from separate sources in a vacuum, metalliferous particles and insulative polymer particles onto a substrate, the proportion of metalliferous particles being such that the metal in the film is discontinuous, the metal particles being present in the form of islands with intervening zones of polymeric material, the islands having diameters of from 110A to 1000A, and
- subjecting the film in an oxidizing atmosphere at from 200.degree. to 220.degree. C to an oxidative treatment in which substantial oxidation of the separate metal islands is achieved before loss of the polymer by oxidation and/or evaporation.
A process for producing a composite metal polymer film having a negative temperature coefficient of resistance, comprising
- co-depositing, by evaporation from separate sources in a vacuum, metalliferous particles and insulative polymer particles onto a substrate;
- controlling the relative rates of deposition of the metalliferous particles and polymer particles to attain a proportion of metalliferous particles such that the metal in the film is discontinous, the metal particles being present in the form of islands with intervening zones of polymeric material, the islands having diameters of from 110A to 1000A;
- and
- subjecting the film in an oxidizing atmosphere at from 200.degree. to 220.degree. C to an oxidative treatment in which substantial oxidation of the separate metal islands is achieved before loss of the polymer by oxidation and/or evaporation.
A process for producing a metal oxide film, comprising
- i. co-depositing, by evaporation from separate sources in a vacuum, metalliferous particles and insulative polymer particles onto a substrate,
- ii. controlling the relative rates of deposition of the metalliferous particles and polymer particles to attain the proportion of metalliferous particles such that the metal in the film is discontinuous, the metal particles being present in the form of islands with intervening zones of polymeric material, the islands having diameters of from 110A to 1000A, and (ii) heat-treating the film;
- and
- subjecting the film in an oxidizing atmosphere at from 200.degree. to 220.degree. C to an oxidative treatment in which substantial oxidation of the separate metal islands is achieved before loss of the polymer by oxidation and/or evaporation.
Dependencies are inferred from the claim text.