Abrasive slurry regulator assembly
AssigneeSpeedfam Corporation
InventorsDavid M. McNamara, Stephen A. Boettcher
Life of this patent
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Abstract
The regulator assembly comprises body member carried by a support and defining a cavity for detaining a pool of abrasive slurry. An overflow device is associated with the body member for establishing the upper level of a pool of abrasive slurry in the cavity. At least one flow-restrictive conduit component is secured at one end to the body member, communicates with the cavity at the lower end of the pool of abrasive slurry, and presents an outer end from which abrasive slurry is discharged. One of the above-indicated elements is movable whereby to selectively adjust the vertical distance between the plane of the upper level of the pool of abrasive slurry and the plane of the outer end of the conduit component.
Claims5
A regulator assembly for controlling the flow of an abrasive slurry, comprising
- a support,
- body means secured to said support and defining a cavity containing a pool of abrasive slurry therein and having a vertical elongated opening in the side thereof,
- overflow means secured to the side of said body means for establishing the upper level of a pool of abrasive slurry in said cavity, said overflow means including an overflow receptacle secured to said support, with said body means being vertically slidable on said support and said overflow receptacle whereby the upper level of the pool of abrasive slurry in said cavity may be selectively adjusted, and
- a least one flow restrictive conduit means secured at one of said body means and communicating with said cavity at the lower end of the pool of abrasive slurry and presenting an outer end from which abrasive slurry is discharged, and one of said means being movable whereby to selectively adjust the vertical distance between the plane of the upper level in the pool of abrasive slurry and the plane of the outer end of said conduit means.
Dependencies are inferred from the claim text.