Method of manufacturing solid electrolytic capacitor
AssigneeMatsushita Electric Industrial Co., Ltd.
InventorsAkihiko Yoshida, Atsushi Nishino
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Abstract
A method of manufacturing solid electrolytic capacitors, wherein deposition of electrolyte of a semiconductive metal oxide on a semiconductive dielectric film is performed by electrolytic oxidation from a bath of a metallic salt solution. During the electrolysis, the dielectric film is irradiated by radiation, the energy of which is enough to allow the valence electrons to enter the conduction band, so that due to the thus increased charge carriers the dielectric film more readily conducts electric current.
Claims9
A method of manufacturing a solid electrolytic capacitor, which comprises the steps of:
- anodizing the surface of a base material of valve action metal to form a semiconductive dielectric film;
- electrodepositing a semiconductive metal oxide on said dielectric film by electrolytically oxidizing an electrolyte comprising a metallic salt solution at a temperature above 70.degree. C., with said dielectric film being used as an anode and being irradiated with radiation, the energy of which is high enough to allow valence electrons of the dielectric film to enter the conduction band,
- subjecting said metal oxide film to heat treatment at above 110.degree. C.;
- and
- forming a cathode layer on said metal oxide film.
Dependencies are inferred from the claim text.