Method for preparing large single crystal thin films
AssigneeInternational Business Machines Corporation
InventorsPraveen Chaudhari, Jerome John Cuomo, John Wauchope Matthews
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Abstract
A method of making a large single crystal thin film not dependent upon the size or temperature resistance of the substrate crystal by first depositing an amorphous film of the crystalline material to be produced followed by heating of the amorphous film in such a manner that nucleation of epitaxial grains is propagated through the amorphous film whereby a single crystal thin film is produced.
Claims2
A method of growing a single crystal thin film on a substantially inert substrate comprising the steps of:
- depositing an amorphous film onto said inert substrate at a temperature below the crystallization temperature of said amorphous film to form a peripheral part of said amorphous film in a point;
- locally heating said peripheral part of said amorphous film to its crystallization temperature to form a single crystal;
- and
- passing continuously from said single crystal across said amorphous film a hot zone at a temperature below the melt temperature of said amorphous film but sufficiently high to propagate a crystalline phase through said amorphous film, whereby a single crystal thin film is produced.
A method of growing multilayer single crystal thin films of respectively different compositions on a substrate surface comprising a substantially inert portion and a contiguous single crystal portion including the steps of:
- depositing a first amorphous film of a first composition onto said substrate at a temperature below the crystallization temperature of said first amorphous film;
- passing continuously across said first amorphous film from said single crystal contiguous with said first amorphous film a hot zone at a temperature well below the melt temperature of said first amorphous film but sufficiently high to nucleate and to propagate a monocrystalline phase in said first amorphous film, whereby a first single crystal thin film is produced;
- depositing a second amorphous film of a second composition on said first single crystal thin film at a temperature below the epitaxial crystallization temperature of said second amorphous film;
- and
- passing continuously across said second amorphous film hot zone at a temperature well below the melt temperature of said second amorphous film but sufficiently high to nucleate and to propagate a monocrystalline phase in said second amorphous film, whereby a second single crystal thin film is produced.
Dependencies are inferred from the claim text.