Silicon nitride-based sintered material and method for manufacturing the same
AssigneeTokyo Shibaura Electric Co., Ltd.
InventorsTakashi Ishii, Katsutoshi Nishida, Michiyasu Komatsu, Akihiko Tsuge
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Abstract
Disclosed is a silicon nitride-based sintered material having high heat resistance and containing crystal compounds prepared from the silicon nitride and at least one of oxides of the elements belonging to the III A group in the periodic table.
Claims9
A silicon nitride-based sintered material containing silicon yttrium oxynitride crystal compounds prepared from silicon nitride and yttrium oxide, wherein the amount of yttrium present in said crystal compounds is 50 wt% or more based on the total amount of yttrium contained in said silicon nitride-based sintered material.
A silicon nitride-based sintered material containing a silicon yttrium oxynitride crystal compound prepared from silicon nitride and yttrium oxide, wherein said crystal compound is Si.sub.3 N.sub.4.Y.sub.2 O.sub.3.
A sintered material consisting essentially of silicon nitride, yttrium oxide and silicon yttrium oxynitride crystalline compounds, wherein at least 50% of the total yttrium content in the sintered material is present in said crystalline silicon yttrium oxynitride compound.
Dependencies are inferred from the claim text.