III(A)-(VB) Type luminescent diode
AssigneeJenoptik Jena G.m.b.H.
InventorsEhrenfried Butter, Brigitte Jacobs, Klaus Jacobs, Konrad Unger, Alfred Zehe, Rainer Doss, Florian Kugler
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AssigneeJenoptik Jena G.m.b.H.
InventorsEhrenfried Butter, Brigitte Jacobs, Klaus Jacobs, Konrad Unger, Alfred Zehe, Rainer Doss, Florian Kugler
Estimating the term…
Due to its dopant structure, the radiant band of a III(A) - V(B) type luminescent diode, emitting light radiation in the plane of the PN-junction, possesses differences in delay time of .ltoreq. 10.sup.-10 seconds, which permit an extension to higher frequencies. The dopant structure is characterized by an n.sup.+ type basic material incorporating an impurity concentration of N.sub.D .gtoreq. 10.sup.18 cm.sup.-3, and by a graded acceptor dopant profile which within the radiant region has a gradient of .ltoreq. 10.sup.22 cm.sup.-4 and a gradient of .gtoreq. 10.sup.23 cm.sup.-4 in the vicinity of the p.sup.+ region. Thus the injection conditions in respect to the quantum efficiencies and to the frequency range are improved. The diode is fabricated by a diffusion process and/or a liquid epitaxial process, in which definite temperatures and time relations have to be satisfied.
A method for producing a luminescent diode comprising providing a monocrystalline G.sub.a A.sub.s wafer substrate doped with a material of the group consisting of Si, Sn and Te, at a concentration of N.sub.D = 10.sup.18 atoms/cc, to be n+ conductive, then depositing a small p+ layer on said substrate, by a liquid epitaxy process from a non-stoichiometric melt composed of GaAs, Ga, Al and Zn with a weight ratio of 1:4.6 to 4.76:0.015 to 0.028:0.03, by cooling at a rate of 0.5.degree. to 10.degree. C per minute from an initial temperature of about 930.degree. C to a final temperature of about 780.degree. C, whereby Z.sub.n diffuses a short distance into the substrate during growth, to produce a structure of the form:
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