Support device for use in a crucible-free floating zone melting apparatus
AssigneeSiemens Aktiengesellschaft
InventorsGerhard Barowski, Wolfgang Keller, Gerhard Schroetter
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AssigneeSiemens Aktiengesellschaft
InventorsGerhard Barowski, Wolfgang Keller, Gerhard Schroetter
Estimating the term…
In an apparatus for crucible-free zone melting, a device for supporting a lower end of the crystalline rod of semiconductor which has a junction with a seed crystal characterized by the support device being formed by a plurality of sections or parts which are moveable relative to each other from a first position spaced or retracted from the seed crystal and the lower end of the rod to enable melting the rod adjacent to the junction and a second position forming a container surrounding the seed crystal and the lower end of the rod for receiving a supporting or stabilizing medium which dampens or prevents vibrations from being applied to the lower end of the rod and the junction. The sections are held in the second position by a holding means which may either be electromagnetic or mechanical.
In an apparatus for crucible-free zone melting of a crystalline rod of semiconductor material which rod is vertically mounted in the apparatus by mounting means engaging each end of the rod with the lower end of the rod having a junction surface with a seed crystal, said apparatus having a container attached for rotation with the lower mounting means and surrounding said lower end for receiving a stabilization medium to support said lower end from vibration, the improvements comprising said container comprising a plurality of individual sections, said sections being moveable relative to each other from a first position spaced from the seed crystal and said lower end of the rod to enable melting of the rod adjacent to the junction surface to a second position forming the container and surrounding both the seed crystal and said lower end of the rod, and means for holding the sections in said second position so that the container can receive the stabilization medium to support the seed crystal and the end of the rod to reduce vibrations applied to the junction surface and an adjacent conical portion of the lower end of the rod.
Dependencies are inferred from the claim text.