Photoelectric microscope
AssigneeHitachi, Ltd.
InventorsShigeo Moriyama, Yoshio Kawamura
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AssigneeHitachi, Ltd.
InventorsShigeo Moriyama, Yoshio Kawamura
Estimating the term…
Description is made of improvements in a photoelectric microscope which is employed for the measurement of a very small distance. According to this invention, an optical system for making point-symmetric images is disposed in an optical path of an objective of a photoelectric microscope so as to form on an identical focal plane a pair of (two) images of a reference line (or mark) on a test piece which are in the relation of point symmetry to each other, and the distance between the pair of (two) images is measured, whereby the deviating distance of the reference line (or mark) on the test piece from the optic axis of the objective is evaluated. The distance between the pair of images is evaluated by gauging the time difference between two detection signals which are obtained by scanning the pair of images at equal speeds with photoelectric detectors.
A photoelectric microscope, for use in positioning a test piece having a reference line provided thereon, comprising
A method of positioning a test piece having a reference line thereon, comprising the steps of forming a magnified real image of the reference line of said test piece and a point-symmetric image thereof on an identical focal plane by means of an objective and an optical system for making point-symmetric images as disposed in an optical path of said objective, passing the lights of the respective images through two openings provided in a slit plate for scanning said focal plane, introducing the lights passing through the slit plate into two photoelectric transducers disposed behind said respective openings, to convert them into electric signals, detecting the amount of deviation of said test piece from a central optic axis as determined by said objective and said optical system for making point-symmetric images from the relation of the time difference between the generation of said two electric signals.
A method of positioning a test piece having a reference line thereon, comprising the steps of forming optical images of said reference line on said test piece as first and second images point-symmetric to each other on an identical focal plane, scanning said images on said focal plane, converting the brightnesses of the respective optical images into electric signals by photoelectric elements and detecting the relative positions between said reference line and an optic axis of said objective as well as the point-symmetry optical system from a distance by which the respective photoelectric elements actually scan while output signals are obtained from said respective photoelectric elements.
Dependencies are inferred from the claim text.