Solid diffusion dopants for semiconductors and method of making the same
AssigneeDenki Kagaku Kogyo Kabushiki Kaisha
InventorsKoreaki Gunjigake, Masashi Hasegawa, Hiroshi Oizumi, Yoshio Ogata
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Abstract
Disclosed is a solid diffusion source for the phosphorus doping of semiconductors, which comprises a substance composed of at least one kind of compound R.sub.2 O.sub.3 selected from the group consisting of Y.sub.2 O.sub.3, La.sub.2 O.sub.3 and Ce.sub.2 O.sub.3 and P.sub.2 O.sub.5 and containing mainly a compound with a chemical formula R.sub.2 O.sub.3.5P.sub.2 O.sub.5.
Claims13
A solid phosphorus dopant source for semiconductors, comprising a substance composed of at least one kind of compound R.sub.2 O.sub.3 selected from the group consisting of Y.sub.2 O.sub.3, La.sub.2 O.sub.3 and Ce.sub.2 O.sub.3 P.sub.2 O.sub.5 and containing mainly a compound with a chemical formula R.sub.2 O.sub.3. 5P.sub.2 O.sub.5.
Dependencies are inferred from the claim text.