Wafer transport system
AssigneePass-Port Systems, Inc.
InventorsNorman B. Brooks, Michael M. Olmstead
Life of this patent
Estimating the term…
Abstract
An article handling system especially adapted for transporting thin, fragile articles such as silicon wafers into and out of a sealed environment such as a vacuum chamber comprises a vibratory track for transporting articles to be processed, an article handler associated with the track for removing articles from the track for processing and returning them to the track thereafter, and a pair of loader/unloaders at opposite ends of the track for intermittently supplying articles to be processed to the track and removing them therefrom after processing.
Claims21
Apparatus for transporting an article into and out of a sealed chamber through opposed entrance and exit apertures in the walls thereof, comprising:
- A. means defining a rigid track extending through said apertures from one side of said chamber to the other and having at least a portion thereof enclosed for isolating it from its environment,
- B. environment-isolating and vibration decoupling means surrounding each of said apertures and extending from said chamber to an enclosed portion of said track to form a seal for said chamber while vibration-isolating said chamber from said track,
- C. first and second valves interposed in said track on the entrance and exit sides of said chamber, respectively, for passage of articles therethrough, and
- D. means for vibrating said track to advance articles on the track along the track.
Apparatus for transporting an article into and out of a vacuum chamber through opposed entrance and exit apertures in the walls thereof, comprising:
- A. a plurality of interconnected track portions forming a track having a mass substantially greater than that of articles to be carried thereon and extending through said chamber from one side thereof to the other through said apertures,
- B. vacuum isolating and vibration decoupling means enclosing said apertures, extending from said chamber and coupled to said track to form a vacuum seal for said chamber around said track while vibration isolating said chamber from said track, C. first and second valves having inlet and outlet apertures and interconnecting track portions adjacent said entrance and exit apertures, respectively, said valves being adapted to admit articles to, and receive them from, said chamber through said apertures,
- D. means for vibrating said track to advance articles thereon through said valves and into and out of said chamber.
Article handling apparatus for vacuum processing operations, comprising
- A. means forming a vacuum chamber having an entrance aperture and an exit aperture for passage therethrough of articles to be processed,
- B. first and second valves positioned on the entrance and exit sides of said apertures, respectively
- C. means defining a rigid track extending through said apertures from one side of said chamber to the other,
- D. means extending between said chamber and said valves for isolating articles on said track intermediate said chamber and said valve from the atmosphere when said valves are closed and for vibration decoupling said track from said chamber,
- E. means vibrating said track to advance articles therealong into and out of said chamber,
- F. a platen within said chamber
- 1. recessable into said track in a first position to receive an article thereon from said track
- 2. elevatable into a second position removed from said track for processing.
Dependencies are inferred from the claim text.