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US 4,028,135 AGranted
Method of cleaning surfaces by irradiation with ultraviolet light
AssigneeThe United States of America as represented by the Secretary of the Army
InventorsJohn R. Vig, John W. LeBus
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Abstract
Contaminants are rapidly removed from surfaces by precleaning the surfaces in air, and then irradiating the surfaces with shortwave ultraviolet light in the presence of oxygen.
Claims12
Method of removing contaminants from surfaces including the steps of:
- A. precleaning the surfaces with solvents;
- then rinsing in running ultrapure water;
- and finally, spinning dry immediately after the running water rinse;
- said precleaning also being carried out under an atmosphere of air;
- B. placing the precleaned surfaces within about 5 millimeters of a lamp which emits short wavelength ultraviolet light that generates ozone in an oxygen containing atmosphere and that contains at least one wavelength between about 2000 angstroms and about 3000 angstroms;
- and irradiating the placed surfaces in an oxygen containing atmosphere with said short wavelength ultraviolet light from said lamp for about one minute.
3 more elements
Dependencies are inferred from the claim text.