Si.sub.3 N.sub.4 formed by nitridation of sintered silicon compact containing boron
AssigneeGeneral Electric Company
InventorsCharles D. Greskovich, Svante Prochazka
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Abstract
A polycrystalline silicon nitride body is produced by shaping a particulate mixture of silicon powder and boron into a green body, sintering the body to a density ranging from 60% to 75% of the theoretical density of silicon, said sintered body having pores which are interconnecting and open to the surface of the body, and reacting said sintered body with gaseous nitrogen to convert it to silicon nitride.
Claims9
A process for producing a polycrystalline silicon nitride body by nitridation of a polycrystalline sintered body of silicon which comprises forming a particulate mixture of silicon powder and boron, said silicon powder and said boron having an average particle size less than 3 microns, said boron being present in an amount ranging from 0.1% by weight to 5% by weight of said silicon powder, shaping said mixture into a green body having a density of at least 30% of the theoretical density of silicon, an sintering the green body at a temperature ranging from 1250.degree. C to a temperature below the melting point of silicon in an atmosphere which has no significant deteriorating effect on the green body or the resulting sintered body to produce a sintered body having a density ranging from 60% to 75% of the theoretical density of silicon, said sintering densifying said green body in an amount of at least 2%, and nitriding said sintered body by reacting it in a gaseous nitrogen atmosphere ranging from subatmospheric pressure to superatmospheric pressure at a temperature ranging from 1100.degree. C to below the melting point of silicon to form a polycrystalline silicon nitride body having a density ranging from 79% to 92% of the theoretical density of silicon nitride and comprised of polycrystalline silicon nitride containing a boron nitride phase in an amount of 0.1% to 8% by volume of the solid phase of said silicon nitride body, and containing unreacted boron-doped silicon in an amount ranging from zero % to 10% by volume of the solid phase of said silicon nitride body.
A polycrystalline silicon nitride body consisting essentially of polycrystalline silicon nitride, boron-doped silicon having an average grain size ranging from about 0.1 micron to about 6 microns in an amount ranging from 0% to 10% by volume of the solid phase of said silicon nitride body, and a boron nitride phase ranging in size from less than about 1 micron to 5 microns in an amount of 0.1% to 8% by volume of the solid phase of said silicon nitride body, said silicon nitride body having a density ranging from 79% to 92% of the theoretical density of silicon nitride, the silicon nitride grains of said body having an average grain size ranging from about 0.2 microns to about 12 microns.
Dependencies are inferred from the claim text.