Method of forming a serrated surface topography
AssigneeInternational Business Machines Corporation
InventorsRajendra Rangraj Mehta, Otto Voegeli
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Abstract
A method of forming a serrated surface topography useful for the unidirectional propagation of magnetic domains is disclosed. The method includes the step of forming a substantially rectangular wave topograhy on the surface of the structure and subsequently ion milling the rectangular wave topography at an oblique angle of incidence to form the serrated surface topography.
Claims9
A method of forming a serrated surface topography comprising the steps of
- forming a structure having a substantially rectangular wave surface topography,
- ion milling said rectangular wave surface topography at an oblique angle of incidence to form a serrated surface topography.
A method of forming a serrated surface topography having a larger backward slope and a smaller forward slope comprising the steps of
- forming a structure having a substantially rectangular wave surface topography,
- ion milling said rectangular wave surface topography at an oblique angle of incidence to form a serrated surface topography having a backward slope of 90.degree. to 45.degree. .
Dependencies are inferred from the claim text.