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US 4,009,933 AGranted
Polarization-selective laser mirror
AssigneeRCA Corporation
InventorArthur Herbert Firester
Life of this patent
Estimating the term…
Abstract
An optical substrate has an electrically conductive grating on one surface. Over the grating is a multilayered dielectric coating.
Claims8
A polarization-selective laser mirror comprising:
- an optical substrate;
- a light reflective and electrically conductive grating on one surface of the substrate;
- and
- a partial light reflector on the substrate over the grating which will reflect the same wavelength of light as the grating.
1 more element
A method for forming a polarization-selective laser mirror comprising the steps of:
- depositing a layer of light reflective and electrically conductive material onto an optical substrate;
- depositing a photoresist material onto the layer;
- exposing the photoresist material to a light interference pattern by coating the surface of the photoresist material with an immersion fluid, placing on the immersion fluid a prism having an index of refraction which matches the index of refraction of the immersion fluid and shinning light through the phases of the prism to establish an interference pattern on the surface of the photoresist material;
- developing the photoresist material;
- etching the layer which has been exposed by the developed photoresist material so as to completely remove the exposed portion of the layer;
- removing the photoresist material;
- and
- depositing a multi-layered dielectric coating of partially light reflecting material which will reflect the same wavelength of light as the light reflective and electrically conductive material, over the remaining portion of the layer.
5 more elements
Dependencies are inferred from the claim text.