Vapor deposition apparatus including fluid transfer means

An apparatus for exposing articles to a gaseous fluid at an essentially predetermined composition wherein said fluid is comprised of or contains one or more components which are reactive with the surface of said articles, said apparatus comprised of in combination:

• a. a first sealed reaction chamber having sealable access means for the introduction and removal of said articles;
• b. a second sealed chamber having first conduit means connected to at least one source of said fluid and optional sealable access means for the introduction and removal of said articles, whereby said second chamber may optionally be utilized as only a holding chamber for said gaseous fluid or additionally as a second reaction chamber;
• c. a conduit system connecting said first and second chamber;
• d. vacuum producing transfer means and valve means operatively associated with said conduit system for selectively creating pressure differentials between said chambers, whereby each chamber may be evacuated or charged with said gaseous fluid, and fluids transferred back and forth between said chambers after the fluid treatment of said articles;
• e. said apparatus including pressure and temperature control means;
• and
• f. means operatively associated with said conduit system and adapted to separate out reaction by-products and contaminants.