Ion microanalyzer
AssigneeHitachi, Ltd.
InventorsMitsuo Fujiwara, Hifumi Tamura, Toshio Kondo
Life of this patent
Estimating the term…
Abstract
In an ion microanalyzer wherein the secondary ions emitted from a sample as a result of the bombardment of the sample by a primary ion beam are mass-analyzed and selected in accordance with their mass to electric charge ratios and the selected secondary ions are then detected by a detector, the image of the secondary ions emitted from the sample is formed through the converging action of a modified electrostatic lens on a slit disposed between the mass analyzing means and the detector or in front of the mass analyzing means.
Claims18
An ion microanalyzer comprising means for emitting primary ions, means for bombarding a sample with the primary ions to thereby emit secondary ions from said sample, first means for dispersing the secondary ions in accordance with their mass to electric charge ratios, means for detecting the secondary ions dispersed by said first dispersing means, and means for focusing the secondary ions in a direction perpendicular to that of the dispersion of the secondary ions more than in other directions into a predetermined position between said sample and said detecting means to thereby form an image of the secondary ions emitted from said sample on the predetermined position.
Dependencies are inferred from the claim text.