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AssigneeSiemens Aktiengesellschaft
InventorWolfgang Keller
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A device for crucible free zone melting on crystallizable rods, in particular on semiconductor rods, in which the molten zone is produced in the rod which is to be treated, by the electromagnetic field of an induction heating coil which surrounds the rod in annular fashion and at a distance, in which the induction heating coil is supplemented by a parallel-connected capacitor to form an electric heating oscillatory circuit, and in which the oscillatory heating circuit is fed via a high frequency line and at least one adjustable coupling element by a high frequency generator which supplies an a.c. voltage of adjustable frequency. Circuit components are provided between the output of the high frequency generator and the electric heating oscillatory circuit which contains the induction heating coil; at least the high frequency line of such components is equipped with a channel which conducts a flowing coolant.
In a device for crucible-free zone melting of crystallizable rods, in particular semiconductor rods, in which a rod to be treated by an electromagnetic field is supported at its ends and surrounded at a distance by an annular induction heating coil which has a capacitor connected in parallel therewith to form an oscillatory heating circuit, and in which the heating circuit is fed via circuit components including a high frequency line and at least one adjustable coupling element by a high frequency generator which supplies an a.c. voltage of adjustable frequency, the improvement comprising:
In a method for crucible-free zone melting of a crystallizable rod, in particular a semiconductor rod, wherein an induction heating coil of an oscillatory heating circuit is inductively coupled to a rod and fed by a high frequency generator via coupling elements, the improvement comprising the steps of:
In an apparatus for crucible-free zone melting of a crystalline rod, in particular a semiconductor rod, of the type wherein an induction heating coil of an oscillatory heating circuit is inductively coupled to a rod and fed by a high frequency generator via coupling elements, the improvement comprising:
Dependencies are inferred from the claim text.