Conductive line width and resistivity measuring system

Abstract

Method and apparatus for measuring or determining characteristics, such as width and resistivity of a given conductive line, particularly a conductive line produced by integrated circuit technology. The conductive line, having a first width which is formed on an insulating medium is disposed in the vicinity of or adjacent to a second line having a second width different from the first width, which is also conductive and which is made by the same process by which the given conductive line was made. A common constant current is passed through the given conductive line and through the second line. A first voltage is measured between two points spaced apart by a given distance along the given conductive line and a second voltage is measured between two points spaced apart by the given distance along the second line. Characteristics, such as width and resistivity, of the given conductive line, as well as those of the second line, are then determined by utilizing relationships between the measured voltages and known line constants.

Dependencies are inferred from the claim text.