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US 3,969,042 AGranted
Turbomolecular vacuum pump having a gas bearing-supported rotor
AssigneeLeybold-Heraeus GmbH
InventorWerner Bachler
Life of this patent
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Abstract
A turbomolecular vacuum pump has a stator, a rotor having a vertical axis of rotation and disposed in the stator; a drive motor for rotating the rotor; a downwardly open, axially extending chamber in the rotor; a vertically upwardly oriented, stationarily supported stub shaft projecting into the rotor chamber; and axial, as well as radial gas bearings disposed within the rotor chamber for generating gas cushions between the rotor and the stub shaft.
Claims8
A turbomolecular vacuum pump including a stator;
- a rotor having a vertical axis of rotation and disposed in the stator, comprising in combination:
- a. means defining a downwardly open, axially extending chamber in said rotor;
- b. a vertically oriented stub shaft projecting into said chamber and having a foot portion;
- c. means for fixedly supporting said stub shaft at said foot portion;
- d. first and second axially spaced radial gas bearings disposed within said chamber for generating gas cushions between said rotor and said stub shaft;
- e. an axial gas bearing disposed within said chamber for generating a gas cushion between said rotor and said stub shaft;
- f. means defining gas intake and gas outlet channels in said stub shaft for supplying gas to and withdrawing gas from said axial and radial gas bearings;
- and
- g. an electric motor of the outer runner type disposed between the two radial gas bearings and connected to said rotor.
6 more elements
Dependencies are inferred from the claim text.