Process for making silane
AssigneeUnion Carbide Corporation
InventorCarl James Bakay
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Abstract
There is a process for manufacturing SiH.sub.4 by the disproportionation or redistribution of HSiCl.sub.3 which comprises feeding HSiCl.sub.3 into a bed of insoluble solid anion exchange resin containing tertiary amino or quaternary ammonium groups bonded to carbon therein, refluxing the HSiCl.sub.3 to vaporize disproportionated products to the upper portion of the bed and condensing liquid SiCl.sub.4 from the area in which HSiCl.sub.3 is refluxed, maintaining the temperature at the top of the bed above the boiling point of SiH.sub.4 and below the boiling point of H.sub.3 SiCl, and recovering SiH.sub.4 from the bed substantially free of chlorosilanes.
Claims4
The process of producing SiH.sub.4 which comprises providing HSiCl.sub.3 in a bed of an insoluble, solid anion exchange resin congtaining tertiary amino or quaternary ammonium groups bonded to carbon thereof, maintaining the temperature of the bed where HSiCl.sub.3 is provided sufficient to cause said HSiCl.sub.3 to be disproportionated to form vaporous products which rise in the bed, and SiCl.sub.4, which is condensed, maintaining the temperature at the top of the bed above the boiling point of SiH.sub.4 and below the boiling point of H.sub.3 SiCl and recovering SiH.sub.4 which is substantially free of chlorosilicon hydrides from the bed.
Dependencies are inferred from the claim text.