Thin film dielectric storage target and method for making same
AssigneeRaytheon Company
InventorWolfgang M. Feist
Life of this patent
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Abstract
A membrane type dielectric storage target formed from a thin refractory dielectric film is stretched to form at least a one-sided surface, a first surface portion contacting a conductive wire mesh, a second surface portion having areas coated with conductive material imaging the mesh of the first surface portion. The method contemplates forming the conductive image on the second surface portion by photo-resist, decoration, and breakdown techniques.
Claims7
A method for making a target for a storage tube comprising:
- coating a metal mesh with a lacquer layer;
- forming a thin substantially transparent refractory dielectric film on said metal mesh;
- removing said lacquer layer;
- depositing a layer of metal on the opposite side of said film from said mesh, said layer of metal having a thickness in the range of 200A to 500A;
- applying a photo-resist layer on said metal layer;
- illuminating said photo-resist layer through said mesh with ultraviolet light;
- removing the illuminated portions of said photo-resist layer to expose portions of said metal layer;
- and
- removing said exposed portions of said metal layer by etching.
A method for fabricating a dielectric storage target comprising the steps of:
- coating a non-reactive conductive metal mesh with a lacquer layer;
- depositing a thin substantially transparent refractory dielectric film on said lacquer layer;
- evaporating the lacquer layer by applying heat to the film covered mesh;
- immersing the film covered mesh in a plating solution preferably of copper or gold;
- and
- applying a negative potential to the mesh whereby the plating material exudes through the pre-existing fine cracks and pores in the dielectric film in the area of the mesh wires.
A method for making a target for a storage tube comprising:
- coating a metal mesh with a lacquer layer;
- forming a thin substantially transparent refractory dielectric film on said metal mesh;
- removing said lacquer layer;
- applying a layer of photo-resist upon said dielectric film;
- illuminating portions of said photo-resist layer through said metal mesh;
- removing portions of said photo-resist layer illuminated through said metal mesh;
- depositing a layer of gold over remaining portions of said photo-resist layer and portions of said dielectric film exposed where portions of said photo-resist layer were removed;
- and
- removing said remaining portions of said photo-resist layer and portions of said gold layer deposited upon said remaining portions of said photo-resist layer.
Dependencies are inferred from the claim text.