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US 3,955,160 AGranted
Surface acoustic wave device
AssigneeRCA Corporation
InventorMichael Thomas Duffy
Life of this patent
Estimating the term…
Abstract
An insulating substrate, on which is at least one single crystalline electrode and a single crystalline layer of piezoelectric material on the electrode, forms an efficient surface acoustic wave device.
Claims7
A surface acoustic wave device comprising:
- a. an insulating substrate selected from the group consisting of sapphire, spinel and BeO;
- b. at least two single crystalline electrodes on said substrate;
- and
- c. a single crystalline piezoelectric film on said electrodes.
1 more element
A surface acoustic wave device comprising:
- a. an insulating substrate selected from the group consisting of sapphire, spinel and BeO;
- b. at least two single crystalline electrodes selected from the group consisting of conducting GaN and conducting AlN on said substrate;
- and
- c. a single crystalline piezoelectric film selected from the group consisting of insulating AlN, insulating ZnO, and insulating GaN on said electrode.
1 more element
A surface acoustic wave device comprising;
- a. an insulating substrate selected from the group consisting of sapphire, spinel and BeO;
- b. at least one single crystalline electrically conducting plane, on said substrate;
- c. at least one single crystalline piezoelectric film on said electrically conducting plane;
- and
- d. at least two electrodes, shaped in grating transducer patterns, on said piezoelectric film.
2 more elements
Dependencies are inferred from the claim text.