Method for metallizing ceramic green sheets
AssigneeInternational Business Machines Corporation
InventorArnold Friedrich Schmeckenbecher
Life of this patent
Estimating the term…
Abstract
A process for metallizing a ceramic green sheet having via holes or recessed grooves formed therein by depositing a mask forming material over the green sheet, the mask forming material being non-wettable by a composition, either conductive or nonconductive, to be subsequently deposited in the via holes or recessed grooves. After the depositing step, a metal paste is spread or wiped into the vias and grooves and then the sheets are laminated and fired to form a multi-layer ceramic interconnection package whereby the mask forming material is volatized and eliminated from the structure without the necessity of removing the mask forming material in the conventional etching or peeling away methods.
Claims7
A process for making a multilayer ceramic electrical interconnection structure comprising:
- providing a thermoplastic sheet on a ceramic green sheet;
- forming openings in the said thermoplastic sheet in a desired pattern;
- applying a conductive metal paste to the said thermoplastic sheet to fill the said openings and to thereby form a metallized composite structure;
- laminating the said composite structure with at least one other similar metallized composite structure;
- and
- firing the laminated structure by heating from room temperature to the temperature of volatilization of the thermoplastic sheet and then to the sintering temperature of the ceramic green sheet to produce said multilayer ceramic structure.
A process for metallizing a ceramic green sheet compising the steps of:
- a. depositing a thermoplastic material over a ceramic green sheet, the material being non-wettable by a conductive metal composition to be subsequently used for forming patterns on the ceramic green sheet, and being also volatizable at a predetermined temperature,
- b. forming grooves or via holes in the green sheet through the non-wettable material,
- c. depositing said composition over the ceramic green sheet surface so as to deposit said composition in grooves or via holes not covered by the non-wettable material, and
- d. heating the ceramic green sheet material so as to volatize and eliminate said non-wettable material.
Dependencies are inferred from the claim text.