Automated electrical resistivity measuring apparatus for semiconductor crystal rods
AssigneeMotorola, Inc.
InventorsJoseph O. Diehl, Carl A. Germano, Lawrence D. Mason, David R. Veres
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Abstract
A semiconductor crystal resistivity measuring station comprised of an enclosed automatically operated probe apparatus electrically connected to a remotely controlled power supply and an electronic computer for automatically executing precise electrical resistivity measurements, in consecutive increments along a single crystal length.
Claims6
A semiconductor crystal resistivity measuring station comprised of an enclosed probe apparatus electrically interconnected to a remotely controlled power supply and an electronic computer for automatically executing precise electrical resistivity measurements, in consecutive increments along a single crystal length, for similar crystal slices, said apparatus comprising:
- a. at least two electrically insulated rails fixed with respect to said apparatus such that, upon loading a single crystal specimen for electrical resistivity measurements, the cylindrically shaped crystal is caused to be self aligned with respect to said apparatus;
- b. at least two electrically insulated crystal specimen end supports, adjustable so as to accommodate crystal specimens of varying length, which provide a mounting base for electrical contacts of high density screen, or the like, continuously supported by flexible electrical insulating material and an electrical insulating pad;
- all mechanically fixed so as to interface prepared crystal specimen flats, normal to the crystal specimen longitudinal center line and on opposite ends, continuously;
- c. and an encasement to isolate said apparatus from visible light, electrical RF signals, stray electromagnetic energy and heat transfer by convective air currents.
A semiconductor crystal resistivity measuring station comprising:
- a. a housing having a cover;
- b. a pair of electrically insulated rails forming a trough within said housing and beneath said cover whereby a cylindrically shaped crystal is caused to be centrally self aligned therein when placed on said rails;
- c. a pair of electrically insulated crystal specimen end supports, adjustable so as to accommodate crystal specimens of varying length, which provide a mounting base for electrical contacts of a high density screen for electrically and mechanically contacting the end surfaces of the cylindrical crystal;
- and
- d. means for applying electrical power to said screens whereby a uniform electric field is provided in said crystal.
Dependencies are inferred from the claim text.