Fluid bearing transfer and heat treating apparatus and method

A method of heat treating articles, such as silicon wafers, comprising

• A. transferring an article from a supply thereof on a fluid bearing emanating from a track structure in a furnace,
• B. moving said article in predetermined fashion through a portion of said furnace,
• C. altering the manner in which said article moves on said track structure within said furnace,
• D. maintaining said article within said furnace on said track structure for a predetermined period of time, and thereafter.
• E. moving said article from said furnace on said fluid bearing track structure.

Fluid bearing apparatus for supporting and transferring articles, such as silicon wafers, between predetermined first and second stations and at varied predetermined rates of movement under controlled conditions on a fluid supporting and transporting cushion, comprising

• A. fluid bearing track structure extending between said stations comprising
• 1. first and second operatively discrete fluid bearing track sections positioned as linear continuations of each other,
• 2. said track sections each having directional fluid passages extending only through a base surface hereof,
• 3. said fluid passages extending in a predetermined direction so that bearing fluid emanating therefrom positively supports and simultaneously urges an article positioned thereover in said direction without additional assistance,
• B. separate and operatively discrete bearing fluid supply means in conjunction with said respective track sections in communication with the directional fluid passages provided in the base surface of each section, and
• C. control means for selectively regulating the flow of fluid through said separate supply means selectively into said directional fluid passages of each of said track sections so that the flow of bearing fluid emanating from the fluid passages in said respective track sections may be varied selectively to selectively and positively move, stop or accelerate articles passing over said track sections in sequence and under positive control conditions.

Fluid bearing apparatus for transferring and heat treating articles, such as silicon wafers, between predetermined first and second stations and at varied rates of movement comprising

• A. a furnace,
• B. fluid bearing track structure extending through said furnace between said stations comprising
• 1. first and second track sections positioned as linear continuations of each other,
• 2. said track stations each having fluid passages extending through a base surface thereof,
• 3. said track structure being formed of heat resistant material, such as quartz,
• C. separate bearing fluid supply means in conjunction with said respective track sections, and
• D. control means for selectively regulating the flow of fluid through said separate supply means so that the flow rate and velocity of fluid emanating from the fluid passages in said respective track sections may be varied selectively to move, stop or accelerate articles passing over said track sections in sequence.

Apparatus for transferring articles, such as silicon wafers, between predetermined first and second stations and at varied rates of movement, comprising

• A. fluid bearing track structure extending between said stations comprising
• 1. first and second track sections positioned as linear continuations of each other,
• 2. said track sections each having fluid passages extending through a base surface thereof,
• B. separate bearing fluid supply means in conjunction with said respective track sections,
• C. control means for selectively regulating the flow of fluid through said separate supply means so that the flow of bearing fluid emanating from the fluid passages in said respective track sections may be varied selectively to move, stop or accelerate articles passing over said track sections in sequence,
• D. article receiving means positioned adjacent each end of said track structure at said stations,
• 1. each said article receiving means including a supply magazine capable of receiving a quantity of said articles therein,
• 2. said magazine at said first station initially containing a supply of said articles to be transferred in sequence to said second station,
• 3. said magazine at said second station being positioned to receive said articles in sequence as the same are transferred thereto across said track structure, and
• E. means for indexing said magazines to position articles in sequence to be withdrawn from said first magazine for movement along said track structure and to receive articles therein in sequence from said track structure.