Field emission gun improvement
AssigneeAmerican Optical Corporation
InventorLeonard M. Welter
Life of this patent
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Abstract
A field emission gun for use in an instrument such as an electron microscope including the field emission tip, an extraction electrode and focusing and accelerating anode means wherein there is disposed between the tip and the accelerating field of the anode means an electric field of a strength expressed in terms of electron voltage, at least equal to the lowest energy secondary electron sought to be prevented from entering the accelerating field.
Claims6
In a field emission electron gun for use in such as an electron microscope including a vacuum chamber having disposed therein an electron source having a tip, a first anode spaced downstream of said tip, and a second anode spaced downstream of said first anode and voltage means connected to said first and second anodes for supplying electrical potential to establish between said anodes an extraction and a focus and accelerating field to form a beam of said electrons emunating from said source, wherein said eminating electrons also cause secondary electrons to be generated between said tip and first anode and said accelerating field causes said secondary electrons to migrate through said field, the improvement comprising the addition of an electrode intermediate said tip and said first anode, said electrode being connected to voltage means for maintaining said electrode at a potential more positive than said first anode by at least the value of the lowest energy of secondary electron sought to be prevented from migrating through said accelerating field.
Dependencies are inferred from the claim text.