Method and apparatus for determining gas content in inorganic substances
AssigneeSiemens Aktiengesellschaft
InventorRudolf Biermann
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Abstract
A method and apparatus for determining the gas content of inorganic conductive and semiconductive elements and compounds having a low sublimation temperature, in which a melt of the substance in a crucible has a pressure approximately equal to the saturation vapor pressure maintained above the melt with a high vacuum maintained in the extraction chamber. In the disclosed embodiment, this is accomplished in a gas extraction system which can be evacuated and in which is contained a graphite crucible used as a sample vessel with means for heating the crucible by direct passage of current with the crucible having a conically fitted and drilled graphite cover into which a sintered filter is pressed for maintaining the pressure above the melt.
Claims10
A method for determining the gas content of inorganic, conducting and semiconducting elements and their compounds having a low sublimation temperature, by heating a sample vessel of graphite by direct passage of current, with the sample vessel arranged in an evacuated extraction chamber between two movable current supply electrodes, and analyzing the gas given off by a sample placed in the sample vessel by mass spectrometry wherein the improvement comprises generating and maintaining a pressure above the sample in the sample vessel which is approximately equal to the saturation vapor pressure of the substance being measured by placing a filter over said sample vessel while maintaining a high vacuum in the extraction chamber.
Apparatus for determining the gas content of inorganic, conducting and semiconducting elements and their compounds having a low sublimation temperature comprising:
- a. an extraction chamber;
- b. first and second movable electrodes extending into said chamber;
- c. a sample vessel of graphite;
- d. a conically fitted and drilled graphite cover for said sample vessel;
- e. a sintered filter pressed into said graphite vessel;
- f. mass spectrometer means coupled to said extraction chamber for the direct determination of gases and vapors and
- g. wherein said graphite vessel and cover are arranged between said current supply electrodes whereby by placing a sample in said vessel and passing a current therethrough gases contained in said sample will be emitted and can be measured by said means for direct determination.
Dependencies are inferred from the claim text.