Method and apparatus for continuously measuring hydrogen concentration in argon gas
AssigneeDoryokuro Kakunenryo Kaihatsu Jigyodan
InventorsTakao Akiyama, Satoru Takani, Hideo Atsumo
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Abstract
A method and an apparatus for continuously measuring the hydrogen concentration in argon gas containing hydrogen and other impurities. The argon gas containing impurities is continuously passed through a high temperature metal getter to thereby remove impurities other than hydrogen from the argon gas and produce a two-component mixture of gases consisting of argon and hydrogen. The two-component gas is then continuously introduced to a thermal conductivity detector and the hydrogen concentration can be determined from the detected thermal conductivity.
Claims11
A method for continuously measuring the concentration of hydrogen in argon gas containing hydrogen and other impurities comprising the steps of continuously passing the argon gas containing hydrogen and other impurities through a high temperature metal getter to thereby remove impurities other than hydrogen from the argon gas and produce a two-component gas mixture consisting of argon and hydrogen, continuously detecting the thermal conductivity of the two-component gas mixture, and determining the hydrogen concentration from the thus detected thermal conductivity.
An apparatus for measuring the concentration of hydrogen in argon gas containing hydrogen and other impurities comprising an impurity-removing means composed of a high temperature metal getter, means for passing the argon gas through said metal getter, and a thermal conductivity detector coupled to said impurity removing means for detecting the thermal conductivity of the gas passed through the impurity removing means.
Dependencies are inferred from the claim text.