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US 3,943,621 AGranted
Semiconductor device and method of manufacture therefor
AssigneeGeneral Electric Company
InventorDavid K. Hartman
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Abstract
A semiconductor device and method of manufacture therefor includes the establishment of at least one PN junction in a semiconductor chip through conventional techniques. Electrical contacts are formed. The entire semiconductor device is coated with a passivant coating having a first layer of low temperature silicon dioxide and a second layer of glass, the second layer of glass being applied in two steps.
Claims2
A method of manufacture for a semiconductor device comprising the steps of:
- diffusing impurities into a silicon semiconductor chip through photolithographic techniques, wherein said diffusing step leaves said chip coated with silicon dioxide;
- forming contact windows in said silicon dioxide so as to expose the underlying silicon at selected areas;
- coating said silicon dioxide and the peripheral portions of said selected areas with a barrier layer of pyrolytic silicon nitride;
- forming platinum silicide on the remaining exposed portions of said silicon and forming metallic electrical contacts on the platinum silicide;
- forming a layer of low-temperature silicon dioxide on said silicon nitride and said contacts;
- depositing a layer of glass on said layer of low-temperature silicon dioxide, said glass being deposited by the substeps of:
- depositing a first layer of particulate glass and applying heat to cause fusion;
- and
- depositing a second layer of particulate glass and applying heat to cause fusion;
- and
- forming openings in said glass and said low temperature silicon oxide to provide access to said contacts.
8 more elements
Dependencies are inferred from the claim text.