Semiconductor magnetic head
AssigneeHitachi, Ltd.
InventorsNaoki Yamamoto, Kikuji Sato, Tetsu Oi
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Abstract
A semiconductor magnetic head in which a polycrystal thin film of a semiconductor material containing at least a crystal particle having a longitudinal diameter of at least 30 .mu.m is employed as a magneto-sensitive element is disclosed. The semiconductor thin film containing the crystal particle of the longitudinal diameter at least 30 .mu.m can be easily formed with a good reproducibility by evaporating the semiconductor material on an insulation film containing not less than 3 mol % of alumina and then being subjected to a zone melting treatment.
Claims17
In a semiconductor magnetic head comprising a first substrate of a magnetic material having a high permeability, a magneto-sensitive element composed of a semiconductor film provided on said first substrate through a first insulation film interposed therebetween, lead wires connected to said magneto-sensitive element and a second substrate of a magnetic material having a high permeability formed so as to cover said magneto-sensitive element through a second interposed insulation film, the improvement residing in that said magneto-sensitive element is composed of a polycristalline thin film containing at least a crystal particle having a longitudinal diameter of at least 30 .mu.m.
In a magnetic head including at least one substrate of a magnetic material having a high permeability, said substrate having a layer of insulating material on one surface of said substrate, and a Hall element disposed at said one surface, the improvement comprising said Hall element including a thin layer of polycrystalline semiconductor material disposed on said insulating material at said one surface, said polycrystalline material having at least one single crystal area having a dimension in the plane of said thin film layer of at least 30 .mu.m such that said Hall element has the property of a signal-to-noise ratio of less than 1/3 to 1/2 that of a conventional Hall element.
Dependencies are inferred from the claim text.