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US 3,943,013 AGranted
Triac with gold diffused boundary
AssigneeGeneral Electric Company
InventorsRichard W. Kennedy, Edward G. Tefft
Life of this patent
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Abstract
Disclosed is a bidirectional triode thyristor pellet that comprises two current conductive regions and a gate region. Gold is diffused into the boundaries between the several regions to inhibit carrier migration thereacross and thus reduce turnoff time. Also disclosed is a method of fabricating the subject thyristor pellet that permits glass passivation thereof if desired.
Claims11
A method for fabricating a plurality of bilateral thyristor pellets on a single wafer comprising the steps of:
- providing a wafer of semiconductor material defining two major surfaces and selectively diffused with impurities so as to form a plurality of portions, each portion comprising a first conductive region and a second conductive region;
- applying a mask to one of said major surfaces, wherein said mask defines openings at the boundaries between said first conductive regions and said second conductive regions;
- diffusing an auxiliary impurity through said openings, wherein said auxiliary impurity stimulates carrier recombination at said boundaries;
- masking said openings at a temperature low enough that no significant migration of said auxiliary impurity takes place;
- forming new openings in said mask where intersecting grooves that will separate said portions are to be formed;
- forming grooves in said new openings;
- coating said grooves with glass;
- and
- subdividing said wafer between said portions.
6 more elements
Dependencies are inferred from the claim text.