Electron scanning apparatus
AssigneeHitachi, Ltd.
InventorTadao Watanabe
Life of this patent
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Abstract
An electron scanning apparatus is capable of two-dimensional scanning of a specimen with a primary electron beam and also capable of radiating the primary electron beam in spot on the specimen. While moving the specimen in a straight line, the two-dimensional scanning with the primary electron beam is selectively alternated with the spot radiation with the primary electron beam, thus making it possible to identify the point of analysis on the specimen in the course of linear analysis of the specimen.
Claims4
An electron scanning apparatus comprising scanning means for two-dimensionally scanning a specimen with a primary electron beam, means for radiating the surface of said specimen with said primary electron beam in the form of spot, a couple of detector means for detecting information generated from said specimen by said scanning means and said radiating means, display and recording means for displaying and recording said information in response to the output signal from said detector means, and first switching means for selectively alternating between said scanning means and said radiating means.
Dependencies are inferred from the claim text.