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US 3,941,966 AGranted
RF Power transmission line
AssigneeApplied Materials, Inc.
InventorDouglas S. Schatz
Life of this patent
Estimating the term…
Abstract
Transmission line for RF power utilizing generally flat supply and return lines each comprising a plurality of flexible, insulated conductors connected together at their ends. The two lines are enclosed in a flexible sheath which holds the lines in close proximity to each other, and fields produced by the lines tend to cancel each other.
Claims2
In a transmission line for delivering power from a radio frequency power supply to the work coil of an induction heated vapor source:
- A. a radio frequency power source;
- B. an induction heated vapor source having a work coil adapted to be energized with RF energy to produce a magnetic field for inducing a current in a material to be vaporized or in an electrically conductive susceptor in contact with the material to be vaporized;
- C. a supply line comprising a plurality of flexible electrically conductive wires disposed side-by-side extending between the power supply and vapor source and flexible electrically insulative material encasing the wires to form a generally flat unitary structure in which the wires are insulated from each other;
- D. means connecting the ends of the supply line wires electrically together at the power supply and vapor source, respectively;
- E. a return line comprising a plurality of flexible electrically conductive wires disposed side by-side extending between the power supply and vapor source and flexible electrically insulative material encasing the wires to form a generally flat unitary structure in which the wires are insulated from each other;
- F. means connecting the ends of the return line wires electrically together at the power supply and vapor source, respectively;
- and
- G. an insulative flexible sheath extending substantially the length of the supply and return lines serving to hold the lines together in a closely spaced superposed position and permit at least limited longitudinal movement of the lines relative to each other and to the sheath.
5 more elements
In a transmission line for delivering power from a source to a load:
- A. a first group of longitudinally extending flexible wire conductors disposed side-by-side and connected electrically together at their ends to form a generally flat supply line for connection between the source and load, said conductors having individual insulative jackets encasing the same, said jackets being bonded together along their lateral edges to form a unitary structure;
- B. a second group of longitudinally extending flexible wire conductors disposed side-by-side and connected electrically together at their ends to form a generally flat return line for connection between the source and load, said conductors having individual insulative jackets encasing the same, said jackets being bonded together along their lateral edges to form a unitary structure;
- and
- C. flexible sheath means encasing the supply and return lines and holding said lines in close proximity to each other, said sheath means permitting longitudinal movement of the lines relative to each other and to the sheath means.
1 more element
Dependencies are inferred from the claim text.