Method of fabricating a charged couple radiation sensing device
AssigneeRCA Corporation
InventorRobert Dean Larrabee
Life of this patent
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Abstract
Method of fabricating an image sensing array, such as one of the charge coupled device (CCD) type, with a set of transparent insulated conductors over the image receiving surface. A transparent conductor layer on an insulated substrate surface is covered with a thin layer of aluminum. The desired pattern of electrodes is then defined in the aluminum by, for example, a photolithographic masking and etching process. The aluminum remaining is then anodically oxidized to form aluminum oxide, a transparent insulator. The portions of the transparent conductor not protected by the aluminum oxide are then removed and what remains are transparent conductors covered on top by transparent insulation.
Claims9
A method of fabricating a charge coupled radiation sensing array comprising the steps of:
- forming an insulating layer on a semiconductor substrate;
- covering a surface of this layer with a transparent conductor;
- forming a pattern of gate electrodes on this transparent conductor layer of a metal which, when oxidized, is transparent in a region of the radiation spectrum of interest;
- oxidizing substantially in its entirety the pattern of gate electrodes to convert the same to a transparent insulating pattern;
- and
- etching away that portion of the transparent conductor layer not covered by said insulating pattern to thereby form a pattern of transparent conductors covered by transparent insulation.
Dependencies are inferred from the claim text.