Sequential peeling for mask preparation for fabrication of microwave circuits
OwnerLoyd L. Woodham, Raymon H. Aldridgeinventors
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Abstract
A method is disclosed for preparing masks for photo etch purposes. Preselected circuit combinations are scribed in an opaque film supported by a translucent film. Beginning with the most simple circuit combination, the scribed opaque film is peeled away and the resultant circuit is photographed. The next most simple circuit combination of scribed film is peeled away and the new circuit is photographed. This stripping and photographing process is continued until all circuit combinations are photographed from a single art work.
Claims1
In the preparation of masks having opaque and translucent layers of film for fabrication of microwave circuits, the method of sequentially peeling a single mask for redundant use and comprising the steps of:
- a. scribing a plurality of preselected empirically determined circuit combinations into a photographically opaque overlay film sheet without damaging a translucent substrate film;
- b. removing the most simple circuit of opaque film from the scribed sheet;
- c. photographing the resultant simple circuit comprising the remaining opaque and translucent film sheets;
- d. peeling away the next most simple scribed circuit portion;
- e. photographing the resultant circuit;
- and
- f. repeating steps (d) and (e) until all desired circuits are photographed for further reduction.
Dependencies are inferred from the claim text.