Strip type radiation detector and method of making same
AssigneeSiemens Aktiengesellschaft
InventorsOttomar Jantsch, Ingmar Feigt, Wolf Rudiger Willig
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Abstract
An improved strip detector and a method for making such a detector in which a high resistivity N conduction semiconductor body has electrode strips formed thereon by diffusion which strips are formed so as to be covered by an oxide layer at the surface point of the PN junction and in which the opposite side of the semiconductor body then has a substantial amount of material etched away to form a thin semiconductor upon which strip electrodes which are perpendicular to the electrodes on the first side are then placed.
Claims24
A method for making a detector for ionizing radiation which detector contains a plurality of strip-like electrodes on two flat sides of a semi-conductor body with the points of intersection each forming a detector to thereby provide spatial resolution comprising the steps of:
- a. preparing an N conduction semi-conductor body having a resistivity of at least 100 ohm-centimeters so as to have two substantially flat sides;
- b. forming by diffusion a plurality of P conduction elongated electrodes on one side of said semi-conductor in the form of parallel space strips and in such a manner that the PN junction at the surface of the semi-conductor material is covered by an oxide layer;
- c. removing a portion of the semi-conductor material on the other side of the semi-conductor to thereby form a thin semi-conductor layer;
- and
- d. providing a second plurality of elongated parallel spaced metal electrodes on said other side, said electrodes being at an angle to said electrodes on said first side.
Dependencies are inferred from the claim text.