Method of and device for measuring life time of carriers of semiconductor
AssigneeHitachi, Ltd.
InventorYoshio Terasawa
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Abstract
There is disclosed a method of and device for measuring characteristics of a semiconductor by way of a microwave. The variation with time in the concentration of carriers which are produced in the semiconductor by applying an energy thereto from an external energy source such as light source is measured by way of a reflected microwave of an incident microwave directed to a portion of the semiconductor through a tapering antenna, whereby the life time of carriers in the semiconductor is determined.
Claims5
A method of measuring the life time of carriers of a semiconductor, comprising the steps of supplying energy to a sample of a semiconductor to produce carriers therein, directing a microwave signal to a portion of said semiconductor through an antenna to obtain a microwave signal reflected therefrom, said antenna being a waveguide whose one end portion is tapered and has a drawing pen shaped opening, and detecting the reflected microwave signal from said semiconductor portion representative of the variation in the concentration of said carriers with respect to time which variation has a predetermined relationship to the life time of said carriers.
A device for measuring the life time of carriers of a semiconductor, comprising an energy source for supplying energy to a sample of a semiconductor to produce carriers therein, a microwave signal generating means, an antenna of a waveguide whose one end portion is tapered and has a drawing pen shaped opening, a microwave signal from said microwave signal generating means being directed to a portion of said semiconductor through said antenna to obtain a microwave signal reflected therefrom, a detector means for detecting the reflected microwave signal representative of the variation in the concentration of said carriers with respect to time which variation has a predetermined relationship to the life time of said carriers.
Dependencies are inferred from the claim text.