US 3,939,353 AGranted

Electron microscope specimen mounting apparatus

AssigneeKabushiki Kaisha Akashi Seisakusho

InventorsShogo Shirai, Haruo Uchida

Life of this patent

Estimating the term…

Abstract

An apparatus for releasably and adjustably mounting a specimen in an electron microscope. A specimen-holding unit is releasably and fluidtightly mounted in an evacuatable chamber and abutting the lens of the electron microscope in the mounted position. The unit is held in place by the pressure differential between the chamber and the atmosphere when the chamber is evacuated. The specimen-holding unit comprises a rotatable specimen-holding shaft disposed eccentrically within a rotatable support member. The specimen is variably positioned under the electron beam by the rotation of the member and the rotation of the shaft with respect to the member.

Claims7

Dependent claims

In an electron microscope having a specimen chamber evacuated during use of the microscope, an electron beam operative during use of the microscope to irradiate a portion of a specimen and an electron lens for focusing the beam, an apparatus for adjustability and releasably mounting a specimen to undergo irradiation during use of the microscope and for substantially reducing the effect of vibration on the focusing of the beam, said apparatus comprising:

specimen-holding means positionable into an irradiating position wherein a portion of the specimen is exposed to the electron beam and including means for adjustably positioning the specimen when said specimen-holding means is in said irradiating position to variably select the portion of the specimen exposed to the electron beam, means for releasably mounting said specimen-holding means in said irradiating position, and means for rigidly releasably coupling said specimen-holding means to the electron lens when said specimen-holding means is in said irradiating position, said means for releasably mounting said specimen-holding means comprising, a cylindrical support member having a pair of opposed end surfaces and a lateral surface, means mounting said specimen-holding means at one of said end surfaces, means defining a circumferential shoulder on a portion of said lateral surface, and means defining an annular recess in said lateral surface circumferentially of said lateral surface, means defining a throughbore between the interior and the exterior of said specimen chamber for receiving said cylindrical support member, said means defining a throughbore including means defining a second shoulder in a wall of said specimen chamber for engaging with said circumferential shoulder on said lateral surface of said cylindrical support member when said cylindrical support member is disposed within said throughbore, and means disposed within said annular recess hermetically sealing said cylindrical support member in said throughbore, said cylindrical support member having one of said opposed end surfaces exposed to the interior and exterior of said specimen chamber respectively whereby said cylindrical support member is forced toward the interior of said specimen chamber whenever a pressure differential is developed between the interior and the exterior of said specimen chamber to engage said shoulders for rigidly releasably coupling said specimen-holding means by said cylindrical support member to the electron lens to transmit vibratory motion from said specimen-holding means to the lens to substantially prevent the relative movement of one with respect to the other whenever said specimen-holding means is induced to vibrate thereby maintaining the focus of the electron beam on the selected portion of the specimen.

Dependencies are inferred from the claim text.

patentgrep

Loading patent…

Abstract

specimen-holding means positionable into an irradiating position wherein a portion of the specimen is exposed to the electron beam and including means for adjustably positioning the specimen when said specimen-holding means is in said irradiating position to variably select the portion of the specimen exposed to the electron beam, means for releasably mounting said specimen-holding means in said irradiating position, and means for rigidly releasably coupling said specimen-holding means to the electron lens when said specimen-holding means is in said irradiating position, said means for releasably mounting said specimen-holding means comprising, a cylindrical support member having a pair of opposed end surfaces and a lateral surface, means mounting said specimen-holding means at one of said end surfaces, means defining a circumferential shoulder on a portion of said lateral surface, and means defining an annular recess in said lateral surface circumferentially of said lateral surface, means defining a throughbore between the interior and the exterior of said specimen chamber for receiving said cylindrical support member, said means defining a throughbore including means defining a second shoulder in a wall of said specimen chamber for engaging with said circumferential shoulder on said lateral surface of said cylindrical support member when said cylindrical support member is disposed within said throughbore, and means disposed within said annular recess hermetically sealing said cylindrical support member in said throughbore, said cylindrical support member having one of said opposed end surfaces exposed to the interior and exterior of said specimen chamber respectively whereby said cylindrical support member is forced toward the interior of said specimen chamber whenever a pressure differential is developed between the interior and the exterior of said specimen chamber to engage said shoulders for rigidly releasably coupling said specimen-holding means by said cylindrical support member to the electron lens to transmit vibratory motion from said specimen-holding means to the lens to substantially prevent the relative movement of one with respect to the other whenever said specimen-holding means is induced to vibrate thereby maintaining the focus of the electron beam on the selected portion of the specimen.