US 2026/0314318 A1Published application

Mass transfer apparatus and mass transfer method thereof

AssigneeCentury Technology (Shenzhen) Corporation Limited

InventorsKe-Xian LIU, Xiao-Min DENG, Lei-Cheng SUN, Hsin-Chieh WU, Chang ZHANG, Sung-Nan CHENG, Bing-Bing LIU, Yang MEI, Yong LI, Chen-Qiong LV, Shao-Fu YANG, Deng-Kai CHANG

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Abstract

A mass transfer apparatus and a mass transfer method. The mass transfer apparatus includes a supporting portion, a picking and disposing portion, an inspection portion and a control portion. The supporting portion is used to fix at least one of a first substrate and a second substrate. The picking and disposing portion is used to be controlled to pick up a target object from the first substrate or to dispose the target object on the second substrate. The inspection portion is used to inspect a relative position of at least one of the first substrate and the second substrate and the picking and disposing portion, thus generating relative position information to control movement of the supporting portion and the picking and disposing portion. The control portion is used to control operations of the supporting portion and the picking and disposing portion according to the relative position information.

Claims22

Dependent claims

A mass transfer apparatus, comprising:

a supporting portion, configured to support a first substrate and a second substrate;
a picking and disposing portion, disposed relative to the supporting portion, and configured to be controlled to pick up a target object from the first substrate or to dispose the target object on the second substrate;
an inspection portion, disposed relative to the supporting portion and the picking and disposing portion, and configured to inspect a relative position of at least one of the first substrate and the second substrate and the picking and disposing portion, and to generate relative position information to control movement of the supporting portion and the picking and disposing portion;
a control portion, coupled to the supporting portion, the picking and disposing portion and the inspection portion, and configured to control operations of the supporting portion and the picking and disposing portion according to the relative position information;
and
an alignment actuation portion, configured to apply an acting force to at least one of the first substrate and the second substrate on the supporting portion to adjust a position of the target object on the substrate to which the acting force is applied.

3 more elements

Dependencies are inferred from the claim text.