Magnetic tunnel junctions and methods of forming the same
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsMin-Yung KO, Yi-Jen HUANG, Yu-Jen WANG
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AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsMin-Yung KO, Yi-Jen HUANG, Yu-Jen WANG
Estimating the term…
A hardmask (HM), for protecting a magnetic tunnel junction (MTJ), may be formed with two portions of HM material: a taper HM portion and a vertical HM portion, separated by one or more dielectric layers. For example, a first etch process may shape the taper HM portion and the vertical HM portion such that a taller HM remains as compared with only using one HM portion. As a result, the MTJ is protected during a second etch process, which results in increased removal efficiency and lower sidewall redeposition. As a result, the taller HM reduces leakage current and increases yields. For example, the MTJ is sufficiently protected during etching such that the MTJ is less likely to experience conductive bridging and thus less likely to suffer from electrical shorts.
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Dependencies are inferred from the claim text.