Actuator
AssigneeMurata Manufacturing Co., Ltd.
InventorMasaaki FUJISAKI
Life of this patent
Estimating the term…
Abstract
An actuator includes a piezoelectric body having a first main surface and a second main surface, a first electrode disposed on the first main surface, a second electrode disposed on the second main surface, a first vibrating plate disposed on the first electrode, and a second vibrating plate disposed on the second electrode. A thickness of the first vibrating plate differs from a thickness of the second vibrating plate, and fillets are formed between a peripheral edge of the piezoelectric body and the first vibrating plate and between the peripheral edge of the piezoelectric body and the second vibrating plate.
Claims20
An actuator comprising:
- a piezoelectric body having a first main surface and a second main surface;
- a first electrode disposed on the first main surface;
- a second electrode disposed on the second main surface;
- a first vibrating plate disposed on the first electrode;
- and
- a second vibrating plate disposed on the second electrode, wherein
- a thickness of the first vibrating plate differs from a thickness of the second vibrating plate, and
- fillets are provided between a peripheral edge of the piezoelectric body and the first vibrating plate and between the peripheral edge of the piezoelectric body and the second vibrating plate.
An actuator comprising:
- a first piezoelectric body having a first main surface and a second main surface;
- a first electrode disposed on the first main surface;
- a second electrode disposed on the second main surface;
- a second piezoelectric body having a third main surface and a fourth main surface;
- a third electrode disposed on the third main surface;
- a fourth electrode disposed on the fourth main surface;
- a first vibrating plate disposed on the first electrode;
- a second vibrating plate disposed on the second electrode and the third electrode;
- and
- a third vibrating plate disposed on the fourth electrode, wherein
- fillets are provided between a peripheral edge of the first piezoelectric body and the first vibrating plate, between the peripheral edge of the first piezoelectric body and the second vibrating plate, between a peripheral edge of the second piezoelectric body and the second vibrating plate, and between the peripheral edge of the second piezoelectric body and the third vibrating plate.
Dependencies are inferred from the claim text.