Transfer device, and manufacturing method, detection method and detection device thereof
AssigneeChongqing Konka Photoelectric Technology Research Institute Co., Ltd.
InventorsFeng ZHAI, Chun-Lung HSIAO, Ming-Ta TSAI
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Abstract
A transfer device, and a manufacturing method, a detection method and a detection device of the transfer device are provided. The transfer device includes a transfer head. A colloidal crystal layer is formed on at least one bulge of the transfer head. Based on the characteristics that a Bragg reflection effect of a colloidal crystal microsphere structure can present different light colors, whether the bulge is abnormal or not is determined according to light reflected by the colloidal crystal layer on each bulge.
Claims20
A transfer device, comprising:
- a transfer head and a colloidal crystal layer arranged on the transfer head, wherein the transfer head comprises:
- a substrate, and at least one bulge arranged on a back surface of the substrate and configured to be bonded with at least one to-be-transferred chip so as to pick up and transfer the to-be-transferred chip;
- and
- the colloidal crystal layer is formed on the bulge, and at least partially covers a surface, to be attached to the to-be-transferred chip, of the bulge, wherein the colloidal crystal layer comprises colloidal crystal microspheres arranged orderly.
Dependencies are inferred from the claim text.