Integrated heater and cold plate for test applications

A method of manufacturing a thermal control element for testing a device under test (DUT), comprising:

• forming a ceramic multilayer heater including one or more heating elements;
• forming a ceramic heat-exchange component including one or more integral, internal heat-exchange structures configured to distribute a cooling fluid through the ceramic heat-exchange component;
• and
• co-sintering the ceramic multilayer heater and the ceramic heat-exchange component to form a monolithic ceramic thermal control element.

A thermal control system, comprising:

• a device under test (DUT);
• and
• a thermal control element comprising:
• a monolithic ceramic body;
• one or more embedded heating elements integrated within the monolithic ceramic body;
• one or more internal heat-exchange structures formed integrally within the monolithic ceramic body and configured to distribute a cooling fluid through the monolithic ceramic body;
• and
• a device-facing surface of the monolithic ceramic body configured to thermally couple to the DUT,
• wherein the thermal control element is configured to regulate a temperature of the DUT.