Oxide Films and Solid-State Lithium-Based Batteries Containing the Same Using Wet Annealing

Abstract

A method of making a lithium metal oxide film is disclosed. The method includes wet annealing the lithium metal oxide film in a first phase at a first temperature of 450-750° C. for a first length of time (e.g., at least 0.1 hour), in a first oxygen-containing atmosphere further containing a first concentration or amount of water vapor. The first concentration or amount of water vapor is >0, and the metal in the lithium metal oxide is selected from cobalt, manganese, nickel, titanium and iron. The method may further include a second wet annealing phase, conducted at a second temperature for a second length of time, in a second oxygen-containing atmosphere further containing a second concentration or amount of water vapor. The method may further include dry annealing the lithium metal oxide film at a third temperature for a third length of time, in a third oxygen-containing atmosphere in the absence of water vapor.

Dependencies are inferred from the claim text.