Systems and methods for optimizing scanning of samples in inspection systems

A system for optimizing scanning of a sample, comprising:

• a controller including circuitry configured to cause the system to perform operations comprising:
• scanning a first sample;
• generating a beam map based on one or more failed charged particle beams of the scanning and one or more functional charged particle beams of the scanning;
• developing a scanning strategy based on the generated beam map;
• and
• scanning the first sample or a second sample according to the scanning strategy.

A non-transitory computer readable medium that stores a set of instructions that is executable by at least one processor of a computing device to cause the computing device to perform operations for optimizing scanning of a sample, the operations comprising:

• providing a plurality of charged particle beams for scanning a first sample;
• identifying one or more failed charged particle beams of the plurality of charged particle beams;
• identifying one or more functional charged particle beams of the plurality of charged particle beams that scan the first sample;
• generating a beam map based on the identified one or more failed charged particle beams and the identified one or more functional charged particle beams, wherein the generated beam map excludes the identified one or more failed charged particle beams;
• and
• developing a scanning strategy based on the generated beam map for scanning the first sample or a second sample.