Measurement of surface roughness
AssigneeTrinamix GmbH
InventorsJalpa PARMAR, Christian LENNARTZ, Stephan KNAPP, Peter FEJES
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Abstract
Disclosed herein is a method for measuring a surface roughness associated with an object, the method comprising including: a) receiving a speckle image showing an object while being illuminated by coherent electromagnetic radiation associated with a wavelength between 850 nm and 1400 nm, b) determining a surface roughness measure based on the speckle image, and c) providing the surface roughness measure.
Claims16
A method for measuring a surface roughness associated with an object, the method comprising:
- a) receiving a speckle image showing an object while being illuminated by coherent electromagnetic radiation associated with a wavelength between 850 nm and 1400 nm,
- b) determining a surface roughness measure based on the speckle image, and
- c) providing the surface roughness measure.
A device or system for measuring a surface roughness, the system or device comprising:
- (a) an illumination source configured for illuminating an object with coherent electromagnetic radiation associated with a wavelength between 850 nm and 1400 nm,
- (b) a camera configured for generating a speckle image showing an object under illumination with the coherent electromagnetic radiation associated with a wavelength between 850 nm and 1400 nm, and
- (c) a processor configured for receiving the speckle image from the camera and determining a surface roughness measure based on the speckle image and providing the surface roughness measure.
A non-transitory computer-readable storage medium, the computer-readable storage medium including comprising instructions, wherein when the computer-readable storage medium is executed by a computer, the instructions cause the computer to:
- a) receive a speckle image showing an object under illumination with coherent electromagnetic radiation associated with a wavelength between 850 nm and 1400 nm,
- b) determine a surface roughness measure based on the speckle image, and
- c) provide the surface roughness measure.
Dependencies are inferred from the claim text.