Three-dimensional soft compliant array tactile sensor with multi-modal sensing and scalable manufacturing methods

A method of forming a three-dimensional (3D) tactile sensor, comprising:

• forming a first substrate material according to a target 3D structure for the 3D tactile sensor;
• defining a set of first conductive regions for the 3D tactile sensor on the first substrate material;
• providing a separator material over at least a portion of the set of first conductive regions;
• and coupling a second substrate material having a set of second conductive regions to the separator material, the second substrate material conforming to a 3D structure of the first substrate material.

A three-dimensional (3D) tactile sensor, comprising:

• a stack comprising:
• a first layer of substrate material having a set of first conductive regions,
• a separator material coupled to the first layer of substrate material, and
• a second layer of substrate material having a set of second conductive regions isolated from the set of first conductive regions by the separator material,
• wherein the stack is thermoformed to conform to a target 3D structure.