Display Device and Method

Abstract

A method of fabricating a liquid crystal on silicon device such as a liquid crystal on silicon spatial light modulator. The method comprises a first set of steps. The first set of steps comprises forming a pixelated mirror layer on a silicon wafer; passivating the pixelated mirror layer by coating with dielectric; polishing the dielectric to expose pixel mirrors of the pixelated mirror layer; and applying a polymer layer to provide electrostatic protection. The first set of steps may be performed by a back-end wafer processing facility. The method comprises a second set of steps. The second set of steps comprises: removing the polymer layer to expose the pixel mirrors; and applying an alignment layer such as a polyimide alignment layer known in the art of liquid crystal devices. The second step of sets may be performed by an assembly house such as a silicon device assembly house.

Dependencies are inferred from the claim text.