Photonic package
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsYu-Yi HUANG, Yu-Hao KUO, Chiao-Chun CHANG, Jui-Hsuan TSAI, Yu-Hung LIN, Shih-Peng TAI, Jih-Churng TWU, Chen-Hua YU
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AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsYu-Yi HUANG, Yu-Hao KUO, Chiao-Chun CHANG, Jui-Hsuan TSAI, Yu-Hung LIN, Shih-Peng TAI, Jih-Churng TWU, Chen-Hua YU
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A semiconductor package is provided, including a substrate, a micro lens, a first dielectric material, a second dielectric material, a bonding layer, and a semiconductor wafer. The micro lens is recessed from the top surface of the substrate. A concave area is formed between the surface of the micro lens and the top surface of the substrate. The first dielectric material fills a portion of the concave area and is separated from the top surface of the substrate. The second dielectric material fills a remainder of the concave area and is over the first dielectric material. The second dielectric material is different from the first dielectric material. The bonding layer is formed over the top surface of the substrate and contacts the second dielectric material. The semiconductor wafer is bonded to the bonding layer. The semiconductor wafer includes an optical component therein and aligned with the micro lens.
A semiconductor package, comprising:
A semiconductor package, comprising:
A semiconductor package, comprising:
Dependencies are inferred from the claim text.