Magnet sensor device and production method for a magnet sensor device
OwnerChristoph Schelling, Nico Kerberinventors
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Abstract
A magnet sensor device. The magnet sensor device has at least one measuring bridge device, which has at least one measuring bridge and at least four sensor elements, wherein a first sensor element is of a first sensor element type and has a first sensitivity and/or a first measuring range along a specified first sensing axis and is arranged in a first sensor element layer on and/or above the first substrate surface, wherein a second sensor element is arranged in a second sensor element layer, which lies on one side of the first sensor element layer, and wherein a second sensor element type of the second sensor element differs from the first sensor element type of the first sensor element.
Claims11
A magnet sensor device, comprising:
- a first substrate having a first substrate surface;
- and
- at least one measuring bridge device, which includes at least one measuring bridge, at least four sensor elements, and is configured in such a way that at least one measured value with respect to a magnetic field present at the measuring bridge device is determinable taking into consideration bridge potentials tapped at tap contact points of the measuring bridge device;
- wherein a first sensor element of the at least four sensor elements, which is of a first sensor element type and has a first sensitivity and/or a first measuring range along a specified first sensing axis, is arranged in a first sensor element layer on and/or above the first substrate surface;
- wherein a second sensor element of the at least four sensor elements is arranged in a second sensor element layer, and the second sensor element layer lies, in a spatial direction oriented perpendicularly to the first substrate surface, on one side of the first sensor element layer spaced apart from the first sensor element layer;
- and
- wherein at least one of:
- (i) a second sensor element type of the second sensor element differs from the first sensor element type of the first sensor element, (ii) a second sensing axis of the second sensor element differs from the first sensing axis of the first sensor element, or (iii) a second sensitivity and/or a second measuring range of the second sensor element differs from the first sensitivity and/or the first measuring range of the first sensor element.
A production method for a magnet sensor device, comprising the following steps:
- forming a measuring bridge device, which is configured with at least one measuring bridge and with at least four sensor elements in such a way that at least one measured value with respect to a magnetic field present at the measuring bridge device is determinable taking into consideration bridge potentials tapped at tap contact points of the measuring bridge device;
- wherein a first sensor element of the at least four sensor elements, which is of a first sensor element type and has a first sensitivity and/or a first measuring range along a specified first sensing axis, is arranged in a first sensor element layer on and/or above a first substrate surface of a first substrate;
- wherein a second sensor element of the at least four sensor elements is arranged in a second sensor element layer, which lies, in a spatial direction oriented perpendicularly to the first substrate surface, on one side of the first sensor element layer spaced apart from the first sensor element layer;
- wherein the second sensor element is formed in such a way that at least one of:
- (i) a second sensor element type of the second sensor element differs from the first sensor element type of the first sensor element, (ii) a second sensing axis of the second sensor element differs from the first sensing axis of the first sensor element, or (iii) a second sensitivity and/or a second measuring range of the second sensor element differs from the first sensitivity and/or the first measuring range of the first sensor element.
Dependencies are inferred from the claim text.